Filter-less fluorescence sensor with high separation ability achieved by the suppression of forward-scattered light in silicon

• Yong Joon Choi

• Kazuhiro Takahashi

• Motoharu Matsuda

• Takeshi Hizawa

• Yu Moriwaki

• Fumihiro Dasai

• Yasuyuki Kimura

• Ippei Akita

• Tatsuya Iwata

• Makoto Ishida

• Kazuaki Sawada

Abstract

The improvement of a filter-less fluorescence sensor, by suppressing forward scattering in silicon by surface planarization is presented. A fluorescence microscope has been widely used in biochemical fields. However, it is difficult to miniaturize because optical filters and other parts are necessary. We previously developed a filter-less fluorescence sensor. The separation ability of excitation light and fluorescence in the previous device was 550:1. It is necessary to improve the separation ability. This study focuses on the suppression of forward-scattered incident light in silicon, through the enhanced surface planarization of polysilicon, which is the gate electrode material. The separation ability of the filter-less fluorescence sensor was increased from 550:1 to 1250:1 by the suppression of forward-scattered light.

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 55 (4S), 04EM10-, 2016-03-23

  IOP Publishing

Details

• CRID: 1360284924867176576
• NII Article ID: 210000146401
• DOI: 10.7567/jjap.55.04em10
• ISSN: 13474065
• ISSN: 00214922
• Web Site: http://stacks.iop.org/1347-4065/55/i=4S/a=04EM10/pdf
• Web Site: http://stacks.iop.org/1347-4065/55/i=4S/a=04EM10?key=crossref.46431646bc8522d5a238e5787ad5ac1a
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.55.04EM10
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.55.04EM10/pdf
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