Development of a two-dimensional scanning micro-mirror utilizing magnetic polymer composite

• Junya Suzuki

• Yoshiyuki Onishi

• Kyohei Terao

• Hidekuni Takao

• Fusao Shimokawa

• Fumikazu Oohira

• Hayato Miyagawa

• Takahiro Namazu

• Takaaki Suzuki

Abstract

In this study, we propose a magnetically driven micro-mirror, constructed using negative photoresist SU-8 containing magnetic particles, as a magnetic actuator and torsion bar structure. Because the magnetic polymer composite uses thick negative photoresist SU-8 as the main material, the micro-mirror is simply fabricated in just a few steps by conventional photolithography and deep reactive ion etching. A fabricated prototype of the micro-mirror, which is magnetically driven by using an external magnetic field, is shown to deflect with two-dimensional optical deflection angles of 6.5 and 12.5°. Moreover, Lissajous scanning motion of the fabricated mirror is achieved.

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 55 (6S1), 06GP01-, 2016-04-08

  IOP Publishing

Keywords

• General Physics and Astronomy
• General Engineering

Details

• CRID: 1360847874820728192
• NII Article ID: 210000146681
• DOI: 10.7567/jjap.55.06gp01
• ISSN: 13474065
• ISSN: 00214922
• Web Site: http://stacks.iop.org/1347-4065/55/i=6S1/a=06GP01/pdf
• Web Site: http://stacks.iop.org/1347-4065/55/i=6S1/a=06GP01?key=crossref.4ba8024bff32afd8bc096c00b8740a22
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.55.06GP01
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.55.06GP01/pdf
• Data Source:
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  • CiNii Articles
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