Dissociation degree of nitrogen molecule in low-pressure microwave-discharge nitrogen plasma with various rare-gas admixtures

• Kei Kuwano

• Atsushi Nezu

• Haruaki Matsuura

• Hiroshi Akatsuka

抄録

The dissociation degree of nitrogen molecules is examined in a microwave discharge nitrogen–rare gas mixture plasma with a total discharge pressure of 1 Torr, by actinometry measurement. Although the spectral line from the excited nitrogen atoms is overlapped by the band spectrum of the N 2 first positive system (1PS), the subtraction of the 1PS spectrum fitted theoretically can successfully extract the atomic nitrogen line, which enables actinometry measurement. The nitrogen dissociation degree decreases with increasing mixture ratio of Ar to Kr, whereas it increases with He, which is attributed to the variations in the electron temperature and density. When we dilute the nitrogen with neon, however, we find an anomalous increase in the nitrogen dissociation degree by several orders of magnitude even at a downstream region in the discharge tube. The reason for the dissociation enhancement upon adding neon is discussed in terms of atomic and molecular processes in the plasma.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 55 (8), 086101-, 2016-06-30

  IOP Publishing

キーワード

• General Physics and Astronomy
• General Engineering

詳細情報

• CRID: 1360847874820831744
• NII論文ID: 210000146950
• DOI: 10.7567/jjap.55.086101
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/00214922
• Web Site: http://stacks.iop.org/1347-4065/55/i=8/a=086101/pdf
• Web Site: http://stacks.iop.org/1347-4065/55/i=8/a=086101?key=crossref.e21ef1e0d8faac6c1d30fbe91cf21c38
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.55.086101
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.55.086101/pdf
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