MEMS electrostatic inductive transformer using potassium ion electrets for up- or down-conversion of AC current

• Masato Suzuki

• Takashi Moriyama

• Hiroshi Toshiyoshi

• Gen Hashiguchi

抄録

In this paper, we report on a novel MEMS electrostatic inductive transformer using potassium ion electrets on mechanically movable silicon microelectrodes. The device consists of a pair of electrostatic comb drive actuators that share a common mass in the middle part of a spring–mass–spring system. When an excitation AC voltage is applied to the electrode of the input-port comb drive at its mechanical resonant frequency, the mass in the middle oscillates to generate electrostatic inductive charges on the electrodes of the output-port comb drive, which could be read out as an output current. By appropriately designing the ratio of force factors of input- and output-port comb drives, the device operates as a transformer to amplify the current at a high efficiency over of 90% under the optimal load condition.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 55 (10), 107201-, 2016-09-26

  IOP Publishing

キーワード

• General Physics and Astronomy
• General Engineering

詳細情報

• CRID: 1360566399844209536
• NII論文ID: 210000147145
• DOI: 10.7567/jjap.55.107201
• ISSN: 13474065
• ISSN: 00214922
• Web Site: http://stacks.iop.org/1347-4065/55/i=10/a=107201/pdf
• Web Site: http://stacks.iop.org/1347-4065/55/i=10/a=107201?key=crossref.f75849335d605491585eda3269fad86f
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.55.107201
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.55.107201/pdf
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