Fabrication and characterization of (111)-epitaxial Pb(Zr<sub>0.35</sub>Ti<sub>0.65</sub>)O<sub>3</sub>/Pb(Zr<sub>0.65</sub>Ti<sub>0.35</sub>)O<sub>3</sub> artificial superlattice thin films

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<jats:title>Abstract</jats:title> <jats:p>Artificial superlattice thin films consisting of two different compositions of Pb(Zr,Ti)O<jats:sub>3</jats:sub> (PZT), which are in tetragonal and rhombohedral phases at room temperature in the bulk state, were grown on (111)<jats:italic> <jats:sub>c</jats:sub> </jats:italic>SrRuO<jats:sub>3</jats:sub>/(111)SrTiO<jats:sub>3</jats:sub> by pulsed laser deposition. Fairly perfect periodicity with sharp interfaces was observed by X-ray diffraction and scanning transmission electron microscopy. It was found that the film with each layer of 5 nm thickness had a single-domain structure for both PZT layers, which would arise from the strong mechanical and electrical coupling between PZT layers. The fabricated superlattice thin films showed saturated <jats:italic>P</jats:italic>–<jats:italic>E</jats:italic> hysteresis curves. Larger electromechanical response was observed in the films with smaller layer thickness.</jats:p>

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