Relationship between crystal defects and leakage current in β-Ga<sub>2</sub>O<sub>3</sub> Schottky barrier diodes
抄録
<jats:title>Abstract</jats:title> <jats:p>We fabricated Schottky barrier diodes (SBDs) on the entire surface of a <jats:inline-formula> <jats:tex-math><?CDATA $(0\bar{1}0)$?></jats:tex-math> <jats:inline-graphic xmlns:xlink="http://www.w3.org/1999/xlink" xlink:href="STAP10015if001.gif" xlink:type="simple" /> </jats:inline-formula> β-Ga<jats:sub>2</jats:sub>O<jats:sub>3</jats:sub> single crystal, and investigated the leakage current in both forward and reverse directions. Subsequently, we investigated the distribution of dislocation and void etch pits on the entire surface. The dislocation etch pit density on the surface ranged from <1 × 10<jats:sup>3</jats:sup> to 6 × 10<jats:sup>4</jats:sup>, and its average was 1.1 × 10<jats:sup>4</jats:sup> cm<jats:sup>−2</jats:sup>. The void etch pit density on the surface ranged from <5 × 10<jats:sup>2</jats:sup> to 7 × 10<jats:sup>3</jats:sup>, and its average was 6 × 10<jats:sup>3</jats:sup> cm<jats:sup>−2</jats:sup>. From a comparison between the SBD leakage current and the dislocation and void etch pit densities, we found that dislocations are closely related to the SBD reverse leakage current, and that not all voids produce the leakage current.</jats:p>
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 55 (12), 1202BB-, 2016-11-09
IOP Publishing
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詳細情報 詳細情報について
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- CRID
- 1360003449890839040
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- NII論文ID
- 210000147271
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- ISSN
- 13474065
- 00214922
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