Electron microscopic analysis of surface damaged layer in Pb(Mg_1/3Nb_2/3)O₃–PbTiO₃ single crystal

• Yusuke Kasuya

• Yukio Sato

• Ryosuke Urakami

• Kazuhiro Yamada

• Ryo Teranishi

• Kenji Kaneko

抄録

Single crystals of lead magnesium niobate–lead titanate, Pb(Mg 1/3 Nb 2/3 )O 3 –PbTiO 3 (PMN–PT), have superior dielectric and piezoelectric properties suitable for medical ultrasound imaging. Imaging devices with superior performance can be manufactured from thinner PMN–PT single crystals by mechanical dicing and/or polishing. Although it is often a concern that a damaged layer may form during the mechanical dicing and/or thinning process, the microscopic characteristics of the damaged layer have not yet been investigated in detail. In this study, the microstructural characterization of a damaged layer was investigated by transmission electron microscopy. It was found that mechanical polishing introduced dislocation near the surface of the crystal. It was also found that the domain structure was affected by the introduction of dislocation.

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 56 (1), 010312-, 2016-12-15

  IOP Publishing

キーワード

• General Physics and Astronomy
• General Engineering

詳細情報

• CRID: 1360847874820995712
• NII論文ID: 210000147324
• DOI: 10.7567/jjap.56.010312
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/13474065
• Web Site: http://stacks.iop.org/1347-4065/56/i=1/a=010312/pdf
• Web Site: http://stacks.iop.org/1347-4065/56/i=1/a=010312?key=crossref.390adb61cef37e1ac55c28d2be916741
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.56.010312
• Web Site: https://iopscience.iop.org/article/10.7567/JJAP.56.010312/pdf
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