Experimental study on difference in molecular rotation temperatures between neutral molecules and molecular ions in nitrogen plasma and oxygen plasma by optical emission spectroscopy measurement

• Hiroshi Akatsuka

• Hirokazu Kawano

• Koichi Naoi

• Haruaki Matsuura

• Atsushi Nezu

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 56 (5), 056102-, 2017-04-21

  IOP Publishing

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1360283696336232192
• NII Article ID: 210000147735
• DOI: 10.7567/jjap.56.056102
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/00214922
• Web Site: http://stacks.iop.org/1347-4065/56/i=5/a=056102/pdf
• Web Site: http://stacks.iop.org/1347-4065/56/i=5/a=056102?key=crossref.7fc3bb1ea8c42003fb9989f6302958fa
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN