Operation of three-dimensional MEMS mirror by single superposed driving signal

• Toshiya Nagasawa

• Yohei Oguchi

• Eiji Iwase

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 56 (6S1), 06GN12-, 2017-05-18

  IOP Publishing

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1360284924867857920
• NII Article ID: 210000147937
• DOI: 10.7567/jjap.56.06gn12
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/13474065
• Web Site: http://stacks.iop.org/1347-4065/56/i=6S1/a=06GN12/pdf
• Web Site: http://stacks.iop.org/1347-4065/56/i=6S1/a=06GN12?key=crossref.6d1c45d6415f005ff645b077f9ce829b
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN