Optical model for spectroscopic ellipsometry analysis of plasma-induced damage to SiOC films

• Kentaro Nishida

• Kouichi Ono

• Koji Eriguchi

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 56 (6S2), 06HD01-, 2017-05-16

  IOP Publishing

Keywords

• General Physics and Astronomy
• General Engineering

Details

• CRID: 1360284924867866240
• NII Article ID: 210000147960
• DOI: 10.7567/jjap.56.06hd01
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/13474065
• Web Site: http://stacks.iop.org/1347-4065/56/i=6S2/a=06HD01/pdf
• Web Site: http://stacks.iop.org/1347-4065/56/i=6S2/a=06HD01?key=crossref.13ba8a97704bdc5100f3028ff258c32d
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN