Time-dependent dielectric breakdown characterizations of interlayer dielectric damage induced during plasma processing
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 56 (6S2), 06HD03-, 2017-05-25
IOP Publishing
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Details 詳細情報について
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- CRID
- 1360847874821288064
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- NII Article ID
- 210000147962
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- ISSN
- 13474065
- 00214922
- http://id.crossref.org/issn/13474065
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- Data Source
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- Crossref
- CiNii Articles
- KAKEN