N₂plasma etching processes of microscopic single crystals of cubic boron nitride

• Takahiro Tamura

• Takuya Takami

• Takashi Yanase

• Taro Nagahama

• Toshihiro Shimada

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 56 (6S2), 06HF01-, 2017-05-02

  IOP Publishing

キーワード

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

詳細情報

• CRID: 1360566399844581376
• NII論文ID: 210000147972
• DOI: 10.7567/jjap.56.06hf01
• ISSN: 13474065
• ISSN: 00214922
• Web Site: http://stacks.iop.org/1347-4065/56/i=6S2/a=06HF01/pdf
• Web Site: http://stacks.iop.org/1347-4065/56/i=6S2/a=06HF01?key=crossref.5fd53a1bb4e94a069d010e33a7ab0fb7
• データソース種別:
  • Crossref
  • CiNii Articles
  • KAKEN