Growth of 〈111〉-oriented Cu layer on thin TaWN films

• Mayumi B. Takeyama

• Masaru Sato

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 56 (7S2), 07KC03-, 2017-06-29

  IOP Publishing

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1360284924867920000
• NII Article ID: 210000148102
• DOI: 10.7567/jjap.56.07kc03
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/13474065
• Web Site: http://stacks.iop.org/1347-4065/56/i=7S2/a=07KC03/pdf
• Web Site: http://stacks.iop.org/1347-4065/56/i=7S2/a=07KC03?key=crossref.1814ffb8acc359c496092a85650c49da
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN