Noncontact measurement of substrate temperature by optical low-coherence interferometry in high-power pulsed magnetron sputtering

• Katsuhiro Hattori

• Takayuki Ohta

• Akinori Oda

• Hiroyuki Kousaka

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 57 (1S), 01AC03-, 2017-11-13

  IOP Publishing

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1360284924868123648
• NII Article ID: 210000148541
• DOI: 10.7567/jjap.57.01ac03
• ISSN: 13474065
• ISSN: 00214922
• Web Site: http://stacks.iop.org/1347-4065/57/i=1S/a=01AC03/pdf
• Web Site: http://stacks.iop.org/1347-4065/57/i=1S/a=01AC03?key=crossref.aee7ee47ecaa2274dea98c2c274a0910
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN