Effect of thermal annealing on AlN films grown on sputtered AlN templates by metalorganic vapor phase epitaxy

• Ryo Yoshizawa

• Hideto Miyake

• Kazumasa Hiramatsu

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 57 (1S), 01AD05-, 2017-12-18

  IOP Publishing

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1360283696336289536
• NII Article ID: 210000148548
• DOI: 10.7567/jjap.57.01ad05
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/13474065
• ISSN: http://id.crossref.org/issn/00214922
• Web Site: http://stacks.iop.org/1347-4065/57/i=1S/a=01AD05/pdf
• Web Site: http://stacks.iop.org/1347-4065/57/i=1S/a=01AD05?key=crossref.9403894876e934c8c8ac67b666c6bed1
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN