Piezoelectric MEMS: Ferroelectric thin films for MEMS applications

• Isaku Kanno

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 57 (4), 040101-, 2018-03-09

  IOP Publishing

キーワード

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

詳細情報

• CRID: 1360284924868229120
• NII論文ID: 210000148794
• DOI: 10.7567/jjap.57.040101
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/13474065
• Web Site: http://stacks.iop.org/1347-4065/57/i=4/a=040101/pdf
• Web Site: http://stacks.iop.org/1347-4065/57/i=4/a=040101?key=crossref.5aee02747c54570d58776230884a57ba
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