Direct evaluation of electrical dipole moment and oxygen density ratio at high-<i>k</i>dielectrics/SiO₂interface by X-ray photoelectron spectroscopy analysis

• Nobuyuki Fujimura

• Akio Ohta

• Mitsuhisa Ikeda

• Katsunori Makihara

• Seiichi Miyazaki

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 57 (4S), 04FB07-, 2018-03-15

  IOP Publishing

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1360847874821681920
• NII Article ID: 210000148862
• DOI: 10.7567/jjap.57.04fb07
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/13474065
• Web Site: http://stacks.iop.org/1347-4065/57/i=4S/a=04FB07/pdf
• Web Site: http://stacks.iop.org/1347-4065/57/i=4S/a=04FB07?key=crossref.70969b9b83023daf501f19b88b7ca7e9
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN