Platinum-catalyzed hydrolysis etching of SiC in water: A density functional theory study

• Pho Van Bui

• Daisetsu Toh

• Ai Isohashi

• Satoshi Matsuyama

• Kouji Inagaki

• Yasuhisa Sano

• Kazuto Yamauchi

• Yoshitada Morikawa

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 57 (5), 055703-, 2018-04-17

  IOP Publishing

キーワード

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

詳細情報

• CRID: 1360847874821770880
• NII論文ID: 210000149060
• DOI: 10.7567/jjap.57.055703
• ISSN: 13474065
• ISSN: 00214922
• Web Site: http://stacks.iop.org/1347-4065/57/i=5/a=055703/pdf
• Web Site: http://stacks.iop.org/1347-4065/57/i=5/a=055703?key=crossref.6551cac33d5821ae7df0f56289fbfb1a
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