Chip-scale pattern modification method for equalizing residual layer thickness in nanoimprint lithography
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 57 (6S1), 06HG03-, 2018-05-14
IOP Publishing
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詳細情報 詳細情報について
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- CRID
- 1360566399845113472
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- NII論文ID
- 210000149171
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- ISSN
- 13474065
- 00214922
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- データソース種別
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