Optical and electrical characterization methods of plasma-induced damage in silicon nitride films
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 57 (6S2), 06JD03-, 2018-05-29
IOP Publishing
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Details 詳細情報について
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- CRID
- 1360003449891703680
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- NII Article ID
- 210000149200
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- ISSN
- 13474065
- 00214922
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- Data Source
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- Crossref
- CiNii Articles
- KAKEN