Ohmic contact between titanium and sputtered MoS₂ films achieved by forming-gas annealing

• Mayato Toyama

• Takumi Ohashi

• Kentaro Matsuura

• Jun’ichi Shimizu

• Iriya Muneta

• Kuniyuki Kakushima

• Kazuo Tsutsui

• Hitoshi Wakabayashi

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 57 (7S2), 07MA04-, 2018-06-22

  IOP Publishing

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1360566399845197952
• NII Article ID: 210000149377
• DOI: 10.7567/jjap.57.07ma04
• ISSN: 13474065
• ISSN: 00214922
• ISSN: http://id.crossref.org/issn/13474065
• Web Site: http://stacks.iop.org/1347-4065/57/i=7S2/a=07MA04/pdf
• Web Site: http://stacks.iop.org/1347-4065/57/i=7S2/a=07MA04?key=crossref.d84939207aeb8a32070d5478824a5f9c
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN