Relationship between TiN films with different orientations and their barrier properties

• Masaru Sato

• Mayumi B. Takeyama

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 57 (7S2), 07MB01-, 2018-06-20

  IOP Publishing

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1360566399845199872
• NII Article ID: 210000149379
• DOI: 10.7567/jjap.57.07mb01
• ISSN: 13474065
• ISSN: 00214922
• Web Site: http://stacks.iop.org/1347-4065/57/i=7S2/a=07MB01/pdf
• Web Site: http://stacks.iop.org/1347-4065/57/i=7S2/a=07MB01?key=crossref.e620f878fc61fa51f97e03d4e7fff4d6
• Data Source:
  • Crossref
  • CiNii Articles