One-dimensional array of small tunnel junctions fabricated using 30-nm-diameter gold nanoparticles placed in a 140-nm-wide resist groove

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We present percolative arrays of gold nanoparticles (NPs) formed in a resist groove. To enhance the con nection probability, the width of the resist groove (140 nm) was designed to be approximately five times larger than the diameter of gold NPs (30 nm). Two-stage deposition of gold NPs was employed to form bridge connections between the source and drain electrodes. Dithiol molecules coated on surfaces of gold NPs worked as tunnel barriers. 5 of 12 samples exhibited Coulomb blockade characteristics, in one of which the gate response was confirmed.

source:https://doi.org/10.7567/JJAP.57.098006

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