Epitaxial ferroelectric Y-doped HfO₂ film grown by the RF magnetron sputtering

• Taisei Suzuki

• Takao Shimizu

• Takanori Mimura

• Hiroshi Uchida

• Hiroshi Funakubo

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 57 (11S), 11UF15-, 2018-10-12

  IOP Publishing

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1360284924868703872
• NII Article ID: 210000149824
• DOI: 10.7567/jjap.57.11uf15
• ISSN: 13474065
• ISSN: 00214922
• Web Site: http://stacks.iop.org/1347-4065/57/i=11S/a=11UF15?key=crossref.f7f45d921576cca0c52a5298759d6efe
• Web Site: http://stacks.iop.org/1347-4065/57/i=11S/a=11UF15/pdf
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN