Fabrication of silicone rubber periodic micro-suction cup structures using a 193 nm ArF excimer laser

• Masayuki Okoshi

Journal

• Applied Physics Express

  Applied Physics Express 12 (6), 062012-, 2019-05-28

  IOP Publishing

Keywords

• General Physics and Astronomy
• General Engineering

Details

• CRID: 1360566399836642688
• NII Article ID: 210000155966
• DOI: 10.7567/1882-0786/ab207f
• ISSN: 18820786
• ISSN: 18820778
• Web Site: http://iopscience.iop.org/article/10.7567/1882-0786/ab207f
• Web Site: http://iopscience.iop.org/article/10.7567/1882-0786/ab207f/pdf
• Web Site: https://iopscience.iop.org/article/10.7567/1882-0786/ab207f/pdf
• Web Site: https://iopscience.iop.org/article/10.7567/1882-0786/ab207f
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN