Impact of surface pre-treatment on Pt-nanodot formation induced by remote H₂-plasma exposure

• Shuntaro Fujimori

• Katsunori Makihara

• Mitsuhisa Ikeda

• Akio Ohta

• Seiichi Miyazaki

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 58 (SI), SIIA15-, 2019-07-09

  IOP Publishing

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1360847874812932480
• NII Article ID: 210000156653
• DOI: 10.7567/1347-4065/ab23f9
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.7567/1347-4065/ab23f9/pdf
• Web Site: https://iopscience.iop.org/article/10.7567/1347-4065/ab23f9
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN