Seamless fabrication technique for micro to millimeter structures by combining 3D printing and photolithography

• Takahiro Tamura

• Takaaki Suzuki

Journal

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 58 (SD), SDDL10-, 2019-06-01

  IOP Publishing

Keywords

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

Details

• CRID: 1360847874812693376
• NII Article ID: 210000156749
• DOI: 10.7567/1347-4065/ab09d0
• ISSN: 13474065
• ISSN: 00214922
• Web Site: https://iopscience.iop.org/article/10.7567/1347-4065/ab09d0/pdf
• Web Site: https://iopscience.iop.org/article/10.7567/1347-4065/ab09d0
• Data Source:
  • Crossref
  • CiNii Articles
  • KAKEN