Hardness of chromium nitride thin films prepared with addition of ytterbium

• Takashi Sekine

• Yusei Mizuno

• Tadachika Nakayama

• Hisayuki Suematsu

• Tsuneo Suzuki

収録刊行物

• Japanese Journal of Applied Physics

  Japanese Journal of Applied Physics 59 (SC), SCCB22-, 2019-12-09

  IOP Publishing

キーワード

• General Physics and Astronomy
• Physics and Astronomy (miscellaneous)
• General Engineering

詳細情報

• CRID: 1360847874813125632
• NII論文ID: 210000157535
• DOI: 10.7567/1347-4065/ab5567
• ISSN: 13474065
• ISSN: 00214922
• Web Site: http://iopscience.iop.org/article/10.7567/1347-4065/ab5567
• Web Site: http://iopscience.iop.org/article/10.7567/1347-4065/ab5567/pdf
• Web Site: https://iopscience.iop.org/article/10.7567/1347-4065/ab5567/pdf
• Web Site: https://iopscience.iop.org/article/10.7567/1347-4065/ab5567
• データソース種別:
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  • CiNii Articles
  • KAKEN