Species-specific growth kinetics and film properties in synchrotron radiation-excited Si growth with disilane

• H. Akazawa

• Y. Utsumi

• M. Nagase

収録刊行物

• Applied Surface Science

  Applied Surface Science 79-80 299-303, 1994-05

  Elsevier BV

キーワード

• Surfaces, Coatings and Films
• Condensed Matter Physics
• Surfaces and Interfaces
• General Physics and Astronomy
• General Chemistry

詳細情報

• CRID: 1360581247786393472
• NII論文ID: 30002966983
• DOI: 10.1016/0169-4332(94)90426-x
• ISSN: 01694332
• Web Site: https://api.elsevier.com/content/article/PII:016943329490426X?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:016943329490426X?httpAccept=text/plain
• データソース種別:
  • Crossref
  • CiNii Articles