Arrayed ultrasonic microsensors with high directivity for in-air use using PZT thin film on silicon diaphragms

• Kaoru Yamashita

• Hiroshi Katata

• Masanori Okuyama

• Hiromi Miyoshi

• Genro Kato

• Seiji Aoyagi

• Yoshihiko Suzuki

収録刊行物

• Sensors and Actuators A: Physical

  Sensors and Actuators A: Physical 97-98 302-307, 2002-04

  Elsevier BV

キーワード

• Electrical and Electronic Engineering
• Metals and Alloys
• Surfaces, Coatings and Films
• Condensed Matter Physics
• Instrumentation
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1364233270895667200
• NII論文ID: 30004026974
• DOI: 10.1016/s0924-4247(02)00037-7
• ISSN: 09244247
• ISSN: http://id.crossref.org/issn/09244247
• Web Site: https://api.elsevier.com/content/article/PII:S0924424702000377?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:S0924424702000377?httpAccept=text/plain
• データソース種別:
  • Crossref
  • CiNii Articles