Characterization of particle contamination in process steps during plasma-enhanced chemical vapor deposition operation

• Heru Setyawan

• Manabu Shimada

• Yuji Imajo

• Yutaka Hayashi

• Kikuo Okuyama

収録刊行物

• Journal of Aerosol Science

  Journal of Aerosol Science 34 (7), 923-936, 2003-07

  Elsevier BV

キーワード

• Pollution
• Atmospheric Science
• Fluid Flow and Transfer Processes
• Mechanical Engineering
• Environmental Engineering

詳細情報

• CRID: 1364233270040015616
• NII論文ID: 30004500751
• DOI: 10.1016/s0021-8502(03)00066-1
• ISSN: 00218502
• Web Site: https://api.elsevier.com/content/article/PII:S0021850203000661?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:S0021850203000661?httpAccept=text/plain
• データソース種別:
  • Crossref
  • CiNii Articles