Control of oxygen concentration in heavily antimony-doped Czochralski Si crystals by ambient argon pressure

• Koji Izunome

• Xinming Huang

• Shiniji Togawa

• Kazutaka Terashima

• Shigeyuki Kimura

収録刊行物

• Journal of Crystal Growth

  Journal of Crystal Growth 151 (3-4), 291-294, 1995-06

  Elsevier BV

キーワード

• Materials Chemistry
• Inorganic Chemistry
• Condensed Matter Physics

詳細情報

• CRID: 1360855569334137216
• NII論文ID: 30004618930
• DOI: 10.1016/0022-0248(95)00097-6
• ISSN: 00220248
• Web Site: https://api.elsevier.com/content/article/PII:0022024895000976?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:0022024895000976?httpAccept=text/plain
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