Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic moulding (LIGA process)

• E.W. Becker

• W. Ehrfeld

• P. Hagmann

• A. Maner

• D. Münchmeyer

収録刊行物

• Microelectronic Engineering

  Microelectronic Engineering 4 (1), 35-56, 1986-05

  Elsevier BV

キーワード

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics
• Atomic and Molecular Physics, and Optics
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1360855569808076544
• NII論文ID: 30005465838
• DOI: 10.1016/0167-9317(86)90004-3
• ISSN: 01679317
• ISSN: http://id.crossref.org/issn/01679317
• Web Site: https://api.elsevier.com/content/article/PII:0167931786900043?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:0167931786900043?httpAccept=text/plain
• データソース種別:
  • Crossref
  • CiNii Articles