Possibility to form an ultrahigh packed fine pit and dot arrays for future storage using EB writing
収録刊行物
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- Microelectronic Engineering
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Microelectronic Engineering 83 (4-9), 792-795, 2006-04
Elsevier BV
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詳細情報 詳細情報について
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- CRID
- 1364233268174094336
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- NII論文ID
- 30005467365
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- ISSN
- 01679317
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- データソース種別
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- CiNii Articles