Computer simulation of growth of thin films fabricated by the sputtering method: comparison with experiment

• K. Nanbu

• S. Uchida

• H. Yoshida

収録刊行物

• Thin Solid Films

  Thin Solid Films 228 (1-2), 330-332, 1993-05

  Elsevier BV

キーワード

• Materials Chemistry
• Metals and Alloys
• Surfaces, Coatings and Films
• Surfaces and Interfaces
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1360299768404175360
• NII論文ID: 30006183684
• DOI: 10.1016/0040-6090(93)90627-2
• ISSN: 00406090
• Web Site: https://api.elsevier.com/content/article/PII:0040609093906272?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:0040609093906272?httpAccept=text/plain
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