Hydrogen distribution, nanostructures and optical properties of high deposition rate hot-wire CVD a-Si:H

• Jonathan Baugh

• Keda Wang

• Daxing Han

• Yue Wu

Journal

• Thin Solid Films

  Thin Solid Films 430 (1-2), 95-99, 2003-04

  Elsevier BV

Keywords

• Materials Chemistry
• Metals and Alloys
• Surfaces, Coatings and Films
• Surfaces and Interfaces
• Electronic, Optical and Magnetic Materials

Details

• CRID: 1360861292274525056
• NII Article ID: 30006195885
• DOI: 10.1016/s0040-6090(03)00080-4
• ISSN: 00406090
• Web Site: https://api.elsevier.com/content/article/PII:S0040609003000804?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:S0040609003000804?httpAccept=text/plain
• Data Source:
  • Crossref
  • CiNii Articles