Numerical investigation for nano-particle synthesis in an RF inductively coupled plasma

• Masaya Shigeta

• Takayuki Watanabe

• Hideya Nishiyama

Journal

• Thin Solid Films

  Thin Solid Films 457 (1), 192-200, 2004-06

  Elsevier BV

Keywords

• Materials Chemistry
• Metals and Alloys
• Surfaces, Coatings and Films
• Surfaces and Interfaces
• Electronic, Optical and Magnetic Materials

Details

• CRID: 1363388845530858368
• NII Article ID: 30006198432
• DOI: 10.1016/j.tsf.2003.12.020
• ISSN: 00406090
• ISSN: http://id.crossref.org/issn/00406090
• Web Site: https://api.elsevier.com/content/article/PII:S0040609003019400?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:S0040609003019400?httpAccept=text/plain
• Data Source:
  • Crossref
  • CiNii Articles