A theoretical comparison between interferometric and optical beam deflection technique for the measurement of cantilever displacement in AFM

• Constant A.J. Putman

• Bart G. de Grooth

• Niek F. van Hulst

• Jan Greve

収録刊行物

• Ultramicroscopy

  Ultramicroscopy 42-44 1509-1513, 1992-07

  Elsevier BV

キーワード

• Instrumentation
• Atomic and Molecular Physics, and Optics
• Electronic, Optical and Magnetic Materials

詳細情報

• CRID: 1360581247786587264
• NII論文ID: 30008698937
• DOI: 10.1016/0304-3991(92)90474-x
• ISSN: 03043991
• Web Site: https://api.elsevier.com/content/article/PII:030439919290474X?httpAccept=text/xml
• Web Site: https://api.elsevier.com/content/article/PII:030439919290474X?httpAccept=text/plain
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