Arsenic precipitation at dislocations in GaAs substrate material

  • A. G. Cullis
    Royal Signals and Radar Establishment, St. Andrews Road, Malvern, Worcs. WR14 3PS, England
  • P. D. Augustus
    Plessey Research (Caswell) Ltd., Allen Clark Research Centre, Caswell, Towcester, Northants. NN12 8EQ, England
  • D. J. Stirland
    Plessey Research (Caswell) Ltd., Allen Clark Research Centre, Caswell, Towcester, Northants. NN12 8EQ, England

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<jats:p>High-resolution diffraction utilizing an analytical electron microscope has been employed to identify small (∼500 Å-diam) precipitates attached to line dislocations in gallium arsenide. The results show that the precipitates consist of crystallites of elemental hexagonal arsenic embedded within the gallium arsenide matrix. Precipitates were observed in a range of semi-insulating, p-type, and n-type material and were not dependent on the presence of specific additional dopants for their occurrence. The way in which the particles may originate is discussed.</jats:p>

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