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- A. J. Hughes
- North American Rockwell Corporation, 3370 Miraloma Avenue, Anaheim, California 92803
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- A. C. Thorsen
- North American Rockwell Corporation, 3370 Miraloma Avenue, Anaheim, California 92803
抄録
<jats:p>A detailed investigation of the Hall mobility has been carried out on a series of [inverted lazy s]2-μ-thick n-type {001} Si/{011̄2} Al2O3 films. A specially designed Hall bridge pattern has been used to obtain independent measurements of mobility as a function of current direction in the plane of the film. The data show an anisotropy in the mobility of approximately 9%, with a maximum in mobility occuring along the 〈100〉 Si direction that is parallel to the 〈21̄1̄0〉 Al2O3 direction in the plane of the substrate. This behavior is found to be a consequence, through the piezoresistance effect, of the anisotropic thermal contraction of Al2O3 on cooling from the deposition temperature, which leads to an anisotropic thermally induced stress in the Si.</jats:p>
収録刊行物
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- Journal of Applied Physics
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Journal of Applied Physics 44 (5), 2304-2310, 1973-05-01
AIP Publishing
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詳細情報 詳細情報について
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- CRID
- 1361699996085375872
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- NII論文ID
- 30015886082
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- ISSN
- 10897550
- 00218979
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- データソース種別
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