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- L. Howald
- Institut für Physik der Universität Basel, Klingelbergstrasse 82, CH-4056 Basel, Switzerland
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- H. Rudin
- Institut für Physik der Universität Basel, Klingelbergstrasse 82, CH-4056 Basel, Switzerland
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- H.-J. Güntherodt
- Institut für Physik der Universität Basel, Klingelbergstrasse 82, CH-4056 Basel, Switzerland
抄録
<jats:p>A piezoelectric inertial stepping motor for multiple rotations of small optical or mechanical components has been developed. The spherical rotor can be rotated about two or three orthogonal axes. Angular step resolution of 1 arcsec is achieved and the maximum speed lies in the range of degrees per second. The design is compact and eliminates mechanical backlash. Simple electronic control is achieved with only one wire per rotational axis. Low-voltage signals between 15 and 30 V are sufficient for driving the motor. No voltage is necessary for maintaining the rotor in a static position. A first application is described with laser optics as they are used in the detector of a scanning force microscope, offering the advantage of remote controlled adjustment.</jats:p>
収録刊行物
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- Review of Scientific Instruments
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Review of Scientific Instruments 63 (8), 3909-3912, 1992-08-01
AIP Publishing
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キーワード
詳細情報 詳細情報について
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- CRID
- 1360862723065085696
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- NII論文ID
- 30015952841
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- ISSN
- 10897623
- 00346748
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- データソース種別
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- Crossref
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