Graded TiN Coating by Supersonic Free-Jet PVD Combined with Reactive Plasma

• Yumoto Atsushi

  Department of Mechanical Systems Engineering, Faculty of Engineering, Kogakuin University

• Yamamoto Takahisa

  Department of Advanced Materials Science, Graduate School of Frontier Sciences, University of Tokyo

• Hiroki Fujio

  Department of Mechanical Systems Engineering, Faculty of Engineering, Kogakuin University

• Shiota Ichiro

  Department of Materials Science and Technology, Faculty of Engineering, Kogakuin University

• Niwa Naotake

  Department of Mechanical Systems Engineering, Faculty of Engineering, Kogakuin University

抄録

Ceramic coating is a very popular technology for improving the properties of structural materials. A titanium nitride (TiN) coating is a typical example and has been widely applied to cutting tools, electronic devices and many other fields utilizing its superior physical properties. This paper sought to produce a graded TiN coating on a Ti substrate by combining Supersonic Free-Jet PVD (SFJ-PVD) with a reactive plasma-metal reaction technique. The authors have developed SFJ-PVD as a new coating method in which a coating film is formed by depositing nanoparticles with very high velocity onto a substrate. SFJ-PVD can provide a high deposition rate and thick film coating. Gradually changing the nitrogen flow rate during deposition produces a graded TiN coating, in which composition changes gradually from pure Ti to TiN . A monolithic TiN coating is also produced with SFJ-PVD . XRD analysis of the graded TiN detected peaks for Ti, Ti₂N and TiN, while only a TiN peak is observed in the monolithic TiN coating. EPMA analysis of a graded coating reveals a gradual compositional change from pure Ti to TiN . Few pores or cracks are observed in a graded TiN or in a monolithic TiN formed under the optimized conditions of SFJ-PVD.

収録刊行物

• MATERIALS TRANSACTIONS

  MATERIALS TRANSACTIONS 43 (11), 2932-2934, 2002

  公益社団法人 日本金属学会

キーワード

• physical vapor deposition
• supersonic gas flow
• nanoparticle
• functionally graded material
• titanium nitride

詳細情報

• CRID: 1390001204246338048
• NII論文ID: 130004451747
• NII論文ID: 10012328555
• NII論文ID: 30018850789
• NII書誌ID: AA1151294X
• DOI: 10.2320/matertrans.43.2932
• COI: 1:CAS:528:DC%2BD3sXjtFOi
• ISSN: 13475320
• ISSN: 13459678
• NDL書誌ID: 6367699
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I6367699
• Web Site: https://www.jstage.jst.go.jp/article/matertrans/43/11/43_11_2932/_pdf
• 本文言語コード: en
• データソース種別:
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  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可