Modeling and diagnostics of the structure of rf glow discharges in Ar at 13.56 MHz

• Toshiaki Makabe

• Nobuhiko Nakano

• Yukio Yamaguchi

収録刊行物

• Physical Review A

  Physical Review A 45 (4), 2520-2531, 1992-02-01

  American Physical Society (APS)

キーワード

• Atomic and Molecular Physics, and Optics

詳細情報

• CRID: 1362262944482434944
• NII論文ID: 30019177122
• NII書誌ID: AA10764867
• DOI: 10.1103/physreva.45.2520
• ISSN: 10941622
• ISSN: 10502947
• Web Site: http://link.aps.org/article/10.1103/PhysRevA.45.2520
• Web Site: http://harvest.aps.org/v2/journals/articles/10.1103/PhysRevA.45.2520/fulltext
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