TiNi (shape memory) films silicon for MEMS applications

• R.H. Wolf

• A.H. Heuer

収録刊行物

• Journal of Microelectromechanical Systems

  Journal of Microelectromechanical Systems 4 (4), 206-212, 1995

  Institute of Electrical and Electronics Engineers (IEEE)

キーワード

• Electrical and Electronic Engineering
• Mechanical Engineering

詳細情報

• CRID: 1362262945623375488
• NII論文ID: 30020029142
• NII書誌ID: AA10821111
• DOI: 10.1109/84.475547
• ISSN: 10577157
• Web Site: http://xplorestaging.ieee.org/ielx4/84/10181/00475547.pdf?arnumber=475547
• データソース種別:
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