Antistick Postpassivation of High-Aspect Ratio Silicon Molds Fabricated by Deep-Reactive Ion Etching
収録刊行物
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- Journal of Microelectromechanical Systems
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Journal of Microelectromechanical Systems 15 (1), 84-93, 2006-02
Institute of Electrical and Electronics Engineers (IEEE)
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詳細情報 詳細情報について
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- CRID
- 1361137046375366912
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- NII論文ID
- 30020029906
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- ISSN
- 10577157
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- データソース種別
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- Crossref
- CiNii Articles