A method of designing a robust force controller of a water-hydraulic servo system

• K Sanada

  Yokohama National University Department of Mechanical Engineering, Graduate School of Engineering 79-5 Tokiwadai, Hodogaya, Yokohama, Kanagawa 240-8501, Japan

抄録

Robust force control of a water-hydraulic servo system is discussed. The system treated in this paper is a model of a moulding press used for a fabrication process of large-scale integration packages. The whole surface of a wafer is covered with a thin plastic layer by the press. The performance of force control is important to obtain sufficient quality. The press is driven by a ram cylinder and a water-hydraulic servo valve. Considering the uncertainty caused by the flow characteristics of the valve in the overlap region and the mechanical stiffness of the press, a method of designing a robust force controller is proposed by applying H∞ control theory. Qualitative evaluation of modelling error is the key to the design of the robust controller. The performance of the robust controller is examined using an experimental water-hydraulic servo system set-up. It is illustrated how the system responses are influenced by the weighting function parameters of H∞ control theory.

収録刊行物

• Proceedings of the Institution of Mechanical Engineers, Part I: Journal of Systems and Control Engineering

  Proceedings of the Institution of Mechanical Engineers, Part I: Journal of Systems and Control Engineering 216 (2), 135-141, 2002-03-01

  SAGE Publications

キーワード

• Mechanical Engineering
• Control and Systems Engineering

詳細情報

• CRID: 1361981468912772480
• NII論文ID: 30020036557
• DOI: 10.1243/0959651021541507
• ISSN: 20413041
• ISSN: 09596518
• Web Site: http://journals.sagepub.com/doi/pdf/10.1243/0959651021541507
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