Scanning tunneling microscopy studies of structural disorder and steps on Si surfaces

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<jats:p>Scanning tunneling microscopy observations of several forms of disorder on Si surfaces are presented. These include dimer vacancies on Si(001), step bunches associated with a morphological phase transition on vicinal Si(111), and step structure on vicinal Si(001). A recipe for cleaning of Si surfaces to produce a minimum amount of disorder is presented.</jats:p>

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