Deposition and properties of polycrystalline TiN/NbN superlattice coatings

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  • X. Chu
    Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208
  • M. S. Wong
    BIRL, Northwestern University, Evanston, Illinois 60201-3135
  • W. D. Sproul
    BIRL, Northwestern University, Evanston, Illinois 60201-3135
  • S. L. Rohde
    BIRL, Northwestern University, Evanston, Illinois 60201-3135
  • S. A. Barnett
    Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208

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<jats:p>Polycrystalline TiN/NbN superlattice coatings were deposited on M2 tool steel substrates using an opposed dual-cathode unbalanced magnetron sputtering system. Superlattice deposition was achieved by placing the substrates on a cylindrical holder that rotated on an axis equidistant between, and parallel to, the faces of opposed Ti and Nb targets. Cross contamination of the targets and the alternating superlattice layers was minimized using a baffle or an extra-large cylindrical substrate holder. The superlattice period was determined by the substrate holder rotation speed. Analytical techniques including x-ray diffraction, energy-dispersive spectroscopy and transmission electron microscopy were used to characterize the structure of the superlattice coatings. Microhardness values for the superlattice coatings as high as 5200 kg/mm2 Hv0.05 have been achieved, comparable to the reported highest hardness values of single crystal TiN/VN, TiN/V0.6Nb0.4N and TiN/NbN superlattice coatings. The results indicate that the hardness of the polycrystalline TiN/NbN superlattice coatings is affected not only by superlattice period, but also by nitrogen partial pressure and ion bombardment during deposition.</jats:p>

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