Sharpening of monocrystalline molybdenum tips by means of inert-gas ion sputtering

• S. Morishita

  Applied Physics Laboratory, Department of Systems Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466, Japan

• F. Okuyama

  Applied Physics Laboratory, Department of Systems Engineering, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466, Japan

抄録

Monocrystalline Mo tips oriented to [110] are shown to be sharpened into atomic dimensions, by inert-gas ions impinging along the [110] axis. Xe+ ions accelerated to a few keV provided Mo tips less than 50 Å in apex diameter, in a time interval of 10 min or so. Much smaller radii of curvature were achieved by prolonged Ar+ sputtering at lower energies. It is believed that the technique proposed is promising for preparing focused ion and electron beam sources.

収録刊行物

• Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

  Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 9 (1), 167-169, 1991-01-01

  American Vacuum Society

キーワード

• Surfaces, Coatings and Films
• Surfaces and Interfaces
• Condensed Matter Physics

詳細情報

• CRID: 1362544419869536000
• NII論文ID: 30020306736
• NII書誌ID: AA10635106
• DOI: 10.1116/1.577121
• ISSN: 15208559
• ISSN: 07342101
• Web Site: https://pubs.aip.org/avs/jva/article-pdf/9/1/167/11531954/167_1_online.pdf
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