Beam damage of self-assembled monolayers

• P. C. Rieke

  Pacific Northwest Laboratory, Richland, Washington 99352

• D. R. Baer

  Pacific Northwest Laboratory, Richland, Washington 99352

• G. E. Fryxell

  Pacific Northwest Laboratory, Richland, Washington 99352

• M. H. Engelhard

  Pacific Northwest Laboratory, Richland, Washington 99352

• M. S. Porter

  Pacific Northwest Laboratory, Richland, Washington 99352

抄録

X-ray and electron beam damage studies were performed on Br-terminated and methyl-terminated alkylsilane self-assembled monolayers. X-ray beam initiated damage was primarily limited to removal of the labile Br group and did not significantly damage the hydrocarbon chain. Some of the x-ray beam damage could be attributed to low-energy electrons emitted by the non-monochromatic source, but further damage was attributed to secondary electrons produced in the sample by x-ray exposure. Electron beams caused significant damage to the hydrocarbon chains. Maximum damage occurred with a beam energy of 600 eV and a dosage of 6×10−3 C/cm2.

収録刊行物

• Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

  Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 11 (4), 2292-2297, 1993-07-01

  American Vacuum Society

キーワード

• Surfaces, Coatings and Films
• Surfaces and Interfaces
• Condensed Matter Physics

詳細情報

• CRID: 1360855569936682112
• NII論文ID: 30020307220
• DOI: 10.1116/1.578364
• ISSN: 15208559
• ISSN: 07342101
• Web Site: https://pubs.aip.org/avs/jva/article-pdf/11/4/2292/7371343/2292_1_online.pdf
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